Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Kumagai Hiroshi and Hatakeyama Toshiro and Nakamura Ichiro and Obara Minoru,Theoretical Analysis on a Microwave-Discharge-pumped KrF Excimer lamp,"IEEJ Transactions on Electronics, Information and Systems",03854221,The Institute of Electrical Engineers of Japan,1991,111,3,129-135,https://cir.nii.ac.jp/crid/1390282679584326400,https://doi.org/10.1541/ieejeiss1987.111.3_129