Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Kimoto Tsunenobu and Miyamoto Nao and Matsunami Hiroyuki,Formation of Deep pn Junctions by High-Energy Al and B Ion Implantations into SiC,"IEEJ Transactions on Electronics, Information and Systems",03854221,The Institute of Electrical Engineers of Japan,2002,122,1,17-22,https://cir.nii.ac.jp/crid/1390282679587819904,https://doi.org/10.1541/ieejeiss1987.122.1_17