Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) SUMIDA Shin and KABURAGI Masahiro and OBARA Minoru and FUJIOKA Tomoo,KrF Laser with x-ray Preionization,The Review of Laser Engineering,0387-0200,The Laser Society of Japan,1979,7,3,297-305,https://cir.nii.ac.jp/crid/1390282679625421568,https://doi.org/10.2184/lsj.7.297