{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1390282679709021312.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.2493/jjspe1933.33.339"}},{"identifier":{"@type":"NAID","@value":"130003783751"}}],"dc:title":[{"@value":"半導体集積回路の製造技術"}],"dc:language":"ja","description":[{"type":"abstract","notation":[{"@value":"はじめに,集積回路は当初米国において宇宙開発等に使用するため,信頼度が高く,小形軽量化を目的とし,製造価格を度外視して発達してきた。昨今に至り,従来の部品概念を一変する集積回路は実装の際に工程が短縮されること,装置の信頼度が向上すること,消費電力が軽減されることなどから,共通な論理回路を大量に使用する計算機に使用されるようになり,民需への道が開かれた。<BR>集積回路とはある回路機能を特つ素子で,製作方法は種々開発されているが,能動,受動素子を同一の工程で製作可能な半導体集積回路が一番小形化できること,量産に向いていることなどから,各社で行なわれている製作方法のほとんどは,半導体を主体としている。<BR>ここには,その基本的製造方法と,それに付随する問題点を示す。"}],"abstractLicenseFlag":"disallow"}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1410282679709021312","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000254267770"}],"foaf:name":[{"@language":"ja","@value":"浅川 俊文"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"三菱電機(株)北伊丹製作所"}]},{"@id":"https://cir.nii.ac.jp/crid/1410282679709021313","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000254267771"}],"foaf:name":[{"@language":"ja","@value":"天野 正勝"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"三菱電機(株)北伊丹製作所"}]}],"publication":{"publicationIdentifier":[{"@type":"PISSN","@value":"03743543"}],"prism:publicationName":[{"@language":"en","@value":"Journal of the Japan Society of Precision Engineering"},{"@language":"ja","@value":"精密機械"},{"@language":"en","@value":"Journal of the Japan Society of Precision Engineering"},{"@language":"ja","@value":"精密機械"}],"dc:publisher":[{"@language":"en","@value":"The Japan Society for Precision Engineering"},{"@language":"ja","@value":"公益社団法人 精密工学会"}],"prism:publicationDate":"1967","prism:volume":"33","prism:number":"388","prism:startingPage":"339","prism:endingPage":"347"},"reviewed":"false","availableAt":"1967","dataSourceIdentifier":[{"@type":"JALC","@value":"oai:japanlinkcenter.org:0036854407"},{"@type":"CROSSREF","@value":"10.2493/jjspe1933.33.339"},{"@type":"CIA","@value":"130003783751"}]}