Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
KOKLAKI Masao and MATSUMURO Akihito and MURAMATSU Mutsuo and HAYASHI Toshiyuki and YAMAGUCHI Katsumi,Influence of Ar Ion Addition on Synthesis of Carbon Nitride Films by Ion-Beam-Assisted Deposition.,Journal of the Japan Society for Precision Engineering,09120289,The Japan Society for Precision Engineering,1998,64,1,152-156,https://cir.nii.ac.jp/crid/1390282679740763904,https://doi.org/10.2493/jjspe.64.152