Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) HAYASHI Toshiyuki and MATSUMURO Akihito and MURAMATSU Mutsuo and KOHZAKI Masao and TAKAHASHI Yutaka and YAMAGUCHI Katsumi,Variation in the Preferred Orientations of TiN Thin Films Prepared by Ion-Beam-Assisted Deposition.,Journal of the Japan Society for Precision Engineering,09120289,The Japan Society for Precision Engineering,1999,65,9,1340-1344,https://cir.nii.ac.jp/crid/1390282679741451648,https://doi.org/10.2493/jjspe.65.1340