Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) KUWAHARA Toyoaki and OTANI Yukitoshi and YOSHIZAWA Toru,Profile Measurement using Abramson Interferometer by One-Step Phase Shifting Method.,Journal of the Japan Society for Precision Engineering,09120289,The Japan Society for Precision Engineering,1998,64,9,1380-1384,https://cir.nii.ac.jp/crid/1390282679742155392,https://doi.org/10.2493/jjspe.64.1380