Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
AKIYAMA Satoshi and SAKAI Motoshi,Large Wafer Topography Measurement,Journal of the Japan Society for Precision Engineering,09120289,The Japan Society for Precision Engineering,2007,73,7,768-771,https://cir.nii.ac.jp/crid/1390282679772659712,https://doi.org/10.2493/jjspe.73.768