Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) ISOBE Hiromi and INAGI Takumi and TATEBAYASHI Shinichiro and KYUSOJIN Akira,Basic Research for Characteristics of Non-contact positioning by Squeeze Air Films. Numerical Analysis and Experimental Verification for Step Response.,Journal of the Japan Society for Precision Engineering,09120289,The Japan Society for Precision Engineering,2002,68,1,75-79,https://cir.nii.ac.jp/crid/1390282679772717568,https://doi.org/10.2493/jjspe.68.75