Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
KIMURA Keiichi and MIYOSHI Takashi and TAKAYA Yasuhiro and TAKAHASHI Satoru,Fundamental Study on CMP Process Controlled with Optical Radiation Pressure.,Journal of the Japan Society for Precision Engineering,09120289,The Japan Society for Precision Engineering,2003,69,1,89-94,https://cir.nii.ac.jp/crid/1390282679773102464,https://doi.org/10.2493/jjspe.69.89