Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
UNE Atsunobu and KUNYOO Prayoon and MOCHIDA Masaaki and YOSHITOMI Kenichiro and MATSUI Shinsuke,Development of a Static-pressure Seal-type Vacuum Pin Chuck,Journal of the Japan Society for Precision Engineering,09120289,The Japan Society for Precision Engineering,2003,69,6,798-802,https://cir.nii.ac.jp/crid/1390282679774434944,https://doi.org/10.2493/jjspe.69.798