Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) YOKOTA Shinichi and YOSHIDA Kazuhiro,Micro Fluid Motors and Micro Pumps,Journal of the Japan Society for Precision Engineering,09120289,The Japan Society for Precision Engineering,2002,68,5,653-656,https://cir.nii.ac.jp/crid/1390282679774849792,https://doi.org/10.2493/jjspe.68.653