Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
MIYAMOTO Atsushi and TANAKA Maki and MOROKUMA Hidetoshi,Three-Dimensional Shape Estimation for Bottom Footing of Gate Patterns by CD-SEM,Journal of the Japan Society for Precision Engineering,0912-0289,The Japan Society for Precision Engineering,2016,82,12,1061-1066,https://cir.nii.ac.jp/crid/1390282679806482304,https://doi.org/10.2493/jjspe.82.1061