Preparation of spinel ferrite thin films by plasma assisted MO-CVD.

DOI DOI 6 Citations 4 References Open Access
  • Fujii E.
    Development Res. Lab., Matsushita Electric Industrial Co., Ltd.
  • Torii H.
    Development Res. Lab., Matsushita Electric Industrial Co., Ltd.
  • Aoki M.
    Development Res. Lab., Matsushita Electric Industrial Co., Ltd.

Bibliographic Information

Other Title
  • プラズマ励起ＭＯ‐ＣＶＤ法によるスピネル型酸化鉄薄膜の生成

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Description

Thin films of spine1 ferrite CoxFe3-xO4 (0≤x≤1.0) were prepared by plasma assisted MO-CVD from mixed vapor containing Fe(C5H7O2)3, Co(C5H7O2)3 and O2. X-Ray diffraction patterns and SEM images of the films showed that the films had columnar structure with <100> preferred orientation irrespective of Co content x, and the diameter of the column changed from 1500Å to 400Å with an increase in Co content x from 0 to 1.00. CEMS spectra and B-H loops of the films indicated that direction of the magnetic spin in the film without Co was random, but with increasing Co content it tended to become perpendicular to the film surface.

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Details 詳細情報について

  • CRID
    1390282680068452864
  • NII Article ID
    130004477527
  • DOI
    10.3379/jmsjmag.12.339
    10.1109/tjmj.1989.4564041
  • COI
    1:CAS:528:DyaL1MXoslWgsQ%3D%3D
  • ISSN
    18804004
    02850192
    http://id.crossref.org/issn/02850192
  • Text Lang
    ja
  • Data Source
    • JaLC
    • Crossref
    • CiNii Articles
    • OpenAIRE
  • Abstract License Flag
    Disallowed

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