Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Kito Yoshiaki and Hori Masakazu and Hayashida Yosuke and Suzuki Tomonari and Komiyama Hiroki and Watanabe Tomoyuki and Kurashige Takahiro and Kato Masaki and Nara Kei,Direct Imaging Exposure Equipment with High Overlay Accuracy for Flexible Substrate in Roll-to-Roll Method,The Journal of The Institute of Image Information and Television Engineers,1342-6907,The Institute of Image Information and Television Engineers,2017,71,10,J230-J235,https://cir.nii.ac.jp/crid/1390282680105054336,https://doi.org/10.3169/itej.71.j230