Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Niibe Masahito and Kotaka Takuya and Kawakami Retsuo and Nakano Yoshitaka and Mukai Takashi,Damage Characteristics of <i>n</i>-GaN Crystal Etched with N<sub>2 </sub>Plasma by Soft X-Ray Absorption Spectroscopy,e-Journal of Surface Science and Nanotechnology,1348-0391,The Japan Society of Vacuum and Surface Science,2016,14,0,9-13,https://cir.nii.ac.jp/crid/1390282680164267008,https://doi.org/10.1380/ejssnt.2016.9