Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Yoshida Yusaku and Kakuma Hideaki and Asanuma Hiroshi and Niitsuma Hiroaki,A linear model based noise evaluation of a capacitive servo-accelerometer fabricated by MEMS,IEICE Electronics Express,1349-2543,"The Institute of Electronics, Information and Communication Engineers",2005,2,6,198-204,https://cir.nii.ac.jp/crid/1390282680190963456,https://doi.org/10.1587/elex.2.198