Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) KOHZAKI Masao,Preparation of Boron Containing Thin Films by Magnetron Sputtering Method and Evaluation of Their Mechanical Properties,"Journal of the Japan Society for Precision Engineering, Contributed Papers",13488724,The Japan Society for Precision Engineering,2006,72,6,756-760,https://cir.nii.ac.jp/crid/1390282680258538880,https://doi.org/10.2493/jspe.72.756