著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
NABESAWA Hirofumi and HITOBO Takeshi and ASAJI Toyohisa and ABE Takashi and SEKI Minoru,Microstructure Formation on Polytetrafluoroethylene (PTFE) and Perfluoroalkoxy (PFA) Bulk Plates by a Magnetron Enhanced Reactive Ion Etching System,Ｊｏｕｒｎａｌ ｏｆ ｔｈｅ Ｖａｃｕｕｍ Ｓｏｃｉｅｔｙ ｏｆ Ｊａｐａｎ,18822398,一般社団法人 日本真空学会,2017,60,5,176-181,https://cir.nii.ac.jp/crid/1390282680271387520,https://doi.org/10.3131/jvsj2.60.176