{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1390282680271665152.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.3131/jvsj2.57.214"}},{"identifier":{"@type":"NDL_BIB_ID","@value":"025499440"}},{"identifier":{"@type":"URI","@value":"http://id.ndl.go.jp/bib/025499440"}},{"identifier":{"@type":"URI","@value":"https://ndlsearch.ndl.go.jp/books/R000000004-I025499440"}},{"identifier":{"@type":"NAID","@value":"130004952522"}}],"dc:title":[{"@language":"en","@value":"Measurements of Outgassing Rates in a Field of Analysis"},{"@language":"ja","@value":"分析分野におけるガス放出測定"},{"@language":"ja-Kana","@value":"ブンセキ ブンヤ ニ オケル ガス ホウシュツ ソクテイ"}],"dc:language":"ja","description":[{"type":"abstract","notation":[{"@language":"en","@value":"For many years since 1990's, we have developed thermal desorption spectrometer (TDS) as <i>ex-situ</i> analysis tool, used in wide fields of process control and development of new materials such as semiconductor and flat display devices, polymers, catalyst, metals and so on. Recently TDS is required not just for qualitative or relative comparison but for quantification of thermally-desorbed gasses.<br>   This paper describes the performance and the several key points for quantification in TDS measurements; (1) repeatability of measurements and simple calibration method using referenced materials of ion implanted Si, (2) stability of sensitivity in quadrupole mass spectrometer (QMS), and (3) mass discrimination of QMS sensitivity and its correction method. The correction method for mass discrimination of QMS is successfully demonstrated. Entire results indicate that the TDS measurement provides a good quantitative evaluation of many kinds of outgassing species not only hydrogen and water vapor.<br>"}],"abstractLicenseFlag":"disallow"}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1410290697232717569","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000283623605"}],"foaf:name":[{"@language":"en","@value":"HIRASHITA Norio"},{"@language":"ja","@value":"平下 紀夫"}],"jpcoar:affiliationName":[{"@language":"en","@value":"ESCO Ltd"},{"@language":"ja","@value":"電子科学株式会社"}]},{"@id":"https://cir.nii.ac.jp/crid/1410009224109698816","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000283623606"},{"@type":"NRID","@value":"9000258670386"},{"@type":"NRID","@value":"9000410901190"},{"@type":"NRID","@value":"9000397688484"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/read0205402"}],"foaf:name":[{"@language":"en","@value":"URANO Makoto"},{"@language":"ja","@value":"浦野 真理"}],"jpcoar:affiliationName":[{"@language":"en","@value":"ESCO Ltd"},{"@language":"ja","@value":"電子科学株式会社"}]},{"@id":"https://cir.nii.ac.jp/crid/1410290697232717568","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000283623607"}],"foaf:name":[{"@language":"en","@value":"YOSHIDA Hajime"},{"@language":"ja","@value":"吉田 肇"}],"jpcoar:affiliationName":[{"@language":"en","@value":"National Metrology Institute of Japan (NMIJ), National Institute of Advanced industrial Science and Technology (AIST)"},{"@language":"ja","@value":"独立行政法人産業技術総合研究所　計測標準研究部門　力学計測科　圧力真空標準研究室"}]}],"publication":{"publicationIdentifier":[{"@type":"PISSN","@value":"18822398"},{"@type":"EISSN","@value":"18824749"},{"@type":"NDL_BIB_ID","@value":"000008601226"},{"@type":"ISSN","@value":"18822398"},{"@type":"LISSN","@value":"18822398"},{"@type":"NCID","@value":"AA12298652"}],"prism:publicationName":[{"@language":"en","@value":"Journal of the Vacuum Society of Japan"},{"@language":"en","@value":"J. Vac. Soc. Jpn."},{"@language":"ja","@value":"Ｊｏｕｒｎａｌ　ｏｆ　ｔｈｅ　Ｖａｃｕｕｍ　Ｓｏｃｉｅｔｙ　ｏｆ　Ｊａｐａｎ"}],"dc:publisher":[{"@language":"en","@value":"The Vacuum Society of Japan"},{"@language":"ja","@value":"一般社団法人 日本真空学会"}],"prism:publicationDate":"2014","prism:volume":"57","prism:number":"6","prism:startingPage":"214","prism:endingPage":"218"},"reviewed":"false","url":[{"@id":"http://id.ndl.go.jp/bib/025499440"},{"@id":"https://ndlsearch.ndl.go.jp/books/R000000004-I025499440"}],"availableAt":"2014","relatedProduct":[{"@id":"https://cir.nii.ac.jp/crid/1360574095559752448","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"The interaction of Sb4 molecular beams with Si(100) surfaces: Modulated-beam mass spectrometry and thermally stimulated desorption studies"}]},{"@id":"https://cir.nii.ac.jp/crid/1360848658850881280","@type":"Article","resourceType":"学術雑誌論文(journal article)","relationType":["isReferencedBy"],"jpcoar:relatedTitle":[{"@value":"Highly hydrogen-sensitive thermal desorption spectroscopy system for quantitative analysis of low hydrogen concentration (<b>∼</b>1 <b>×</b> 1016 atoms/cm3) in thin-film samples"}]},{"@id":"https://cir.nii.ac.jp/crid/1360855569314966528","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Chemisorption on polycrystalline tungsten. Part 1.—Carbon monoxide"}]},{"@id":"https://cir.nii.ac.jp/crid/1360855569605616768","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Recommended Practice for the Calibration of Mass Spectrometers"}]},{"@id":"https://cir.nii.ac.jp/crid/1360855570036589184","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"New leak element using sintered stainless steel filter for in-situ calibration of ionization gauges and quadrupole mass spectrometers"}]},{"@id":"https://cir.nii.ac.jp/crid/1361418521143195520","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Mass-dependent effects of channel electron multipliers in residual gas analyzers"}]},{"@id":"https://cir.nii.ac.jp/crid/1362262944134071296","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Kinetic and Experimental Basis of Flash Desorption"}]},{"@id":"https://cir.nii.ac.jp/crid/1390001204065409536","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@language":"en","@value":"VLSI Materials and Processes Characterization using Newly Developed Thermal Desorption Spectroscopy."},{"@value":"新しい昇温脱離ガス分析装置の開発とＶＬＳＩ材料及びプロセス評価への応用"},{"@language":"ja-Kana","@value":"アタラシイ ショウオン ダツリ ガス ブンセキ ソウチ ノ カイハツ ト VL"}]},{"@id":"https://cir.nii.ac.jp/crid/1390001205295968256","@type":"Article","relationType":["isReferencedBy"],"jpcoar:relatedTitle":[{"@language":"ja","@value":"測定学から見た真空計測の基礎 (4)　真空計の長期安定性"},{"@language":"en","@value":"Basics of Vacuum Measurement from viewpoint of Metrology (4) Long-term Stability of Vacuum Gauges"},{"@language":"ja-Kana","@value":"ソクテイガク カラ ミタ シンクウ ケイソク ノ キソ(4)シンクウケイ ノ チョウキ アンテイセイ"},{"@value":"Basics of Vacuum Measurement from viewpoint of Metrology (4)&emsp;Long-term Stability of Vacuum Gauges"}]},{"@id":"https://cir.nii.ac.jp/crid/1390011251797886592","@type":"Article","resourceType":"学術雑誌論文(journal article)","relationType":["isReferencedBy"],"jpcoar:relatedTitle":[{"@language":"en","@value":"Effective Decomposition of Water Vapor in Radio-Frequency Plasma with Carbon Deposition on Vessel Wall"}]},{"@id":"https://cir.nii.ac.jp/crid/1390282679044265984","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@language":"en","@value":"Recent Progress and Application of Mass Filter"},{"@value":"最近のマスフィルタとその応用"},{"@language":"ja-Kana","@value":"サイキン ノ マスフィルタ ト ソノ オウヨウ 1 ドウサ ゲンリ ト シツリョウ ブンセキケイ ト シテ ノ ショ トクセイ"}]},{"@id":"https://cir.nii.ac.jp/crid/2050870367085212160","@type":"Article","resourceType":"学術雑誌論文(journal article)","relationType":["isReferencedBy"],"jpcoar:relatedTitle":[{"@value":"The GAs Extraction and Analyses system (GAEA) for immediate extraction and measurements of volatiles in the Hayabusa2 sample container"}]}],"dataSourceIdentifier":[{"@type":"JALC","@value":"oai:japanlinkcenter.org:1003673024"},{"@type":"NDL_SEARCH","@value":"oai:ndlsearch.ndl.go.jp:R000000004-I025499440"},{"@type":"CROSSREF","@value":"10.3131/jvsj2.57.214"},{"@type":"CIA","@value":"130004952522"},{"@type":"CROSSREF","@value":"10.3131/jvsj2.58.265_references_DOI_AedLTw06wMS8XjmQXZ4BLbC2hbG"},{"@type":"CROSSREF","@value":"10.1186/s40623-022-01638-x_references_DOI_AedLTw06wMS8XjmQXZ4BLbC2hbG"},{"@type":"CROSSREF","@value":"10.1585/pfr.17.2405087_references_DOI_AedLTw06wMS8XjmQXZ4BLbC2hbG"},{"@type":"CROSSREF","@value":"10.1063/1.4982255_references_DOI_AedLTw06wMS8XjmQXZ4BLbC2hbG"}]}