Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Nishi Fumito and Katsura Seiichiro,Nanoscale Motion Control Using Composite Filter for Disturbance Observer,IEEJ Journal of Industry Applications,21871094,The Institute of Electrical Engineers of Japan,2015,4,2,98-104,https://cir.nii.ac.jp/crid/1390282680392444544,https://doi.org/10.1541/ieejjia.4.98