Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) MATSUE Tatsuya and HANABUSA Takao and IKEUCHI Yasukazu,Thermal Relaxation of Residual Stresses in Multi Hard Films Deposited by Arc Ion Plating,"Journal of the Society of Materials Science, Japan",05145163,"The Society of Materials Science, Japan",2007,56,7,635-640,https://cir.nii.ac.jp/crid/1390282680394465280,https://doi.org/10.2472/jsms.56.635