Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Matsumura Kazutoshi and Matsumoto Katsutoshi and Taniguchi Syoji,Experiment of wet-etching with spry nozzle for copper in ferric chloride solution,Proceedings of JIEP Annual Meeting,,The Japan Institute of Electronics Packaging,2004,18,0,177-178,https://cir.nii.ac.jp/crid/1390282680530964992,https://doi.org/10.11486/ejisso.18.0.177.0