Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Takeda Kyousuke and Takeuchi Akira and Katou Kiyotaka,Development of an in-line plasma equipment and it's evaluation,Proceedings of JIEP Annual Meeting,,The Japan Institute of Electronics Packaging,2007,21,0,3-5,https://cir.nii.ac.jp/crid/1390282680531118720,https://doi.org/10.11486/ejisso.21.0.3.0