Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Nagano Yukio and Nakashima Kensaku and Oota Masatoshi and Uematsu Kazuyoshi,Diffusion mechanism of thin-film multi layer of AlN submount,Proceedings of JIEP Annual Meeting,,The Japan Institute of Electronics Packaging,2011,25,0,241-244,https://cir.nii.ac.jp/crid/1390282680533290752,https://doi.org/10.11486/ejisso.25.0_241