Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Fukushima Tadakazu and Ohkubo Tomohiro and Iuchi Tohru,Measurements of emissivity behaviors of silicon semiconductor wafers,SICE Division Conference Program and Abstracts,13437631,The Society of Instrument and Control Engineers,2002,sf19,0,67-67,https://cir.nii.ac.jp/crid/1390282680536732672,https://doi.org/10.11499/siced.sf19.0.67.0