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Advanced Methods of Producing Ultra-Pure Silicon Carbide Products
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- Wada Hiroaki
- Bridgestone Corporation
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- Endo Shigeki
- Bridgestone Corporation
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- Takahashi Yoshitomo
- Bridgestone Corporation
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- Ogino Takao
- Bridgestone Corporation
Bibliographic Information
- Other Title
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- プリカーサー法による高純度ＳｉＣ材料の創製
Description
Bridgestone Corporation has established a unique mass production process of pure (6N) silicon carbide (SiC) powder (precursor method). We also invented a new sintering method for obtaining ultra-high purity SiC sintered body using non-metallic sintering agent. We will describe outline of the process, characteristics of the SiC products and some applications. The products has already been widely accepted by major semiconductor device makers and tool makers. We will also touch upon the development of single crystal silicon carbide wafer of extremely high purity.
Journal
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- Preprints of Annual Meeting of The Ceramic Society of Japan<br> Preprints of Fall Meeting of The Ceramic Society of Japan
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Preprints of Annual Meeting of The Ceramic Society of Japan<br> Preprints of Fall Meeting of The Ceramic Society of Japan 2004F (0), 414-414, 2004
The Ceramic Society of Japan
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Details 詳細情報について
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- CRID
- 1390282680590306432
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- NII Article ID
- 130006969583
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed