{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1390282680596477952.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.14853/pcersj.2008f.0.579.0"}},{"identifier":{"@type":"NAID","@value":"130006979069"}}],"dc:title":[{"@language":"en","@value":"Fabrication of ZnO thin film by Spin Spray technique"},{"@language":"ja","@value":"スピンスプレー法によるZnO薄膜の作製と評価"}],"dc:language":"ja","description":[{"type":"abstract","notation":[{"@language":"en","@value":"In this report, zinc oxide (ZnO) films were fabricated by using Spin Spray technique, which is consisted of spraying two kinds of solutions containing metal ion or oxidizing agent to revolving heated substrate.   Though there are many advantages in this technique such as simple equipment, low-cost, low-temperature (< 100 degree C.) and high deposition rate etc...,  it has almost only used to prepare spinel ferrite thin films.  For the first time, Spin Spray technique was applied to prepare ZnO films."},{"@language":"ja","@value":"本研究ではスピンスプレー法により酸化亜鉛膜を作製した。スピンスプレー法とは回転する加熱された基板上(＜100℃)に、原料水溶液と酸化剤を含む水溶液を別々のスプレーノズルから噴射することによって、基板上での化学反応と不均一核生成により製膜する方法である。この方法は水溶液から低温での製膜が可能である点や、高い製膜速度という利点を持っており、近年フェライト膜作製の研究が精力的に行われている。しかし、これらの利点にもかかわらずフェライト以外の酸化物膜作製への応用はほとんど行われていなかった。本研究はこのスピンスプレー法を用いて酸化亜鉛膜の作製に成功した初めての報告となる。"}],"abstractLicenseFlag":"disallow"}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1420564276163225472","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"40633722"},{"@type":"NRID","@value":"1000040633722"},{"@type":"CINII_AUTHOR_ID","@value":"DA19852163"},{"@type":"URI","@value":"https://ci.nii.ac.jp/author/DA19852163#entity"},{"@type":"URI","@value":"https://viaf.org/viaf/NII%7CDA19852163"},{"@type":"NRID","@value":"9000305607432"},{"@type":"NRID","@value":"9000391887862"},{"@type":"NRID","@value":"9000391903146"},{"@type":"NRID","@value":"9000241878388"},{"@type":"NRID","@value":"9000412608035"},{"@type":"NRID","@value":"9000391878771"},{"@type":"NRID","@value":"9000402018828"},{"@type":"NRID","@value":"9000391883069"},{"@type":"NRID","@value":"9000273022772"},{"@type":"NRID","@value":"9000391870472"},{"@type":"NRID","@value":"9000290128760"},{"@type":"NRID","@value":"9000391874164"},{"@type":"NRID","@value":"9000391873635"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/7000016484"}],"foaf:name":[{"@language":"en","@value":"Wagata Hajime"},{"@language":"ja","@value":"我田 元"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Tokyo Institute of technology"},{"@language":"ja","@value":"東京工業大学"}]},{"@id":"https://cir.nii.ac.jp/crid/1410282680596477953","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000391887863"}],"foaf:name":[{"@language":"en","@value":"A. 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technology"},{"@language":"ja","@value":"東京工業大学"}]},{"@id":"https://cir.nii.ac.jp/crid/1420282801191409920","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"90229469"},{"@type":"NRID","@value":"1000090229469"},{"@type":"NRID","@value":"9000391874168"},{"@type":"NRID","@value":"9000391854306"},{"@type":"NRID","@value":"9000257850225"},{"@type":"NRID","@value":"9000391892136"},{"@type":"NRID","@value":"9000257850342"},{"@type":"NRID","@value":"9000336045942"},{"@type":"NRID","@value":"9000290131599"},{"@type":"NRID","@value":"9000402247796"},{"@type":"NRID","@value":"9000397953994"},{"@type":"NRID","@value":"9000014268958"},{"@type":"NRID","@value":"9000402018831"},{"@type":"NRID","@value":"9000283553359"},{"@type":"NRID","@value":"9000238898176"},{"@type":"NRID","@value":"9000402412367"},{"@type":"NRID","@value":"9000380980351"},{"@type":"NRID","@value":"9000391855972"},{"@type":"NRID","@value":"9000375909129"},{"@type":"NRID","@value":"9000378064853"},{"@type":"NRID","@value":"9000391856911"},{"@type":"NRID","@value":"9000238935651"},{"@type":"NRID","@value":"9000345394800"},{"@type":"NRID","@value":"9000001406828"},{"@type":"NRID","@value":"9000323295320"},{"@type":"NRID","@value":"9000356651233"},{"@type":"NRID","@value":"9000283548503"},{"@type":"NRID","@value":"9000256059446"},{"@type":"NRID","@value":"9000360555402"},{"@type":"NRID","@value":"9000391863852"},{"@type":"NRID","@value":"9000398291269"},{"@type":"NRID","@value":"9000283550089"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/read0183733"}],"foaf:name":[{"@language":"en","@value":"Matsushita Nobuhiro"},{"@language":"ja","@value":"松下 伸広"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Tokyo Institute of technology"},{"@language":"ja","@value":"東京工業大学"}]}],"publication":{"prism:publicationName":[{"@language":"en","@value":"Preprints of Annual Meeting of The Ceramic Society of Japan<br>\nPreprints of Fall Meeting of The Ceramic Society of Japan"},{"@language":"ja","@value":"日本セラミックス協会　年会・秋季シンポジウム 講演予稿集"}],"dc:publisher":[{"@language":"en","@value":"The Ceramic Society of Japan"},{"@language":"ja","@value":"公益社団法人 日本セラミックス協会"}],"prism:publicationDate":"2008","prism:volume":"2008F","prism:number":"0","prism:startingPage":"579","prism:endingPage":"579"},"availableAt":"2008","foaf:topic":[{"@id":"https://cir.nii.ac.jp/all?q=Spin%20Spray%20technique","dc:title":"Spin Spray technique"},{"@id":"https://cir.nii.ac.jp/all?q=Zinc%20oxide","dc:title":"Zinc 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