Micro Phenomena in Low Contact-Force Probing (2)
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- Kataoka Kenichi
- The University of Tokyo
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- Itoh Toshihiro
- The University of Tokyo
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- Suga Tadatomo
- The University of Tokyo
Bibliographic Information
- Other Title
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- 低接触力プロービングにおけるマイクロ現象（第２報）
- プローブ材料のコンタクト耐久性への影響
Abstract
New contact method without applying large force is required for testing of LSI devices of next generation. Fritting phenomena, which is a kind of electric breakdown, has been focused as a method for low-force contact probing. One of the advantages of fritting contact is less damage on the probe or on the electrode on the LSI devices. In our previous work, however, the electrode materials were found to adhere to the probe after hundreds of contacts. In this report, the characteristics of the contact duration and observation of adhesion to the probe will be reported using probes of different materials in order to discuss the influences of probe material on the contact duration.
Journal
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- Proceedings of JSPE Semestrial Meeting
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Proceedings of JSPE Semestrial Meeting 2005S (0), 49-49, 2005
The Japan Society for Precision Engineering
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Details 詳細情報について
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- CRID
- 1390282680626960512
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- NII Article ID
- 130004657634
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- Data Source
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- JaLC
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed