Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Nakajima Ryusuke and Takahashi Satoru and Miyoshi Takashi and Takaya Yasuhiro,Study on Detection of Silicon Wafer Surface Defects by Using Infrared Evanescent Light (6th Report) - Internal Defect Detection,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2003,2003S,0,580-580,https://cir.nii.ac.jp/crid/1390282680627299840,https://doi.org/10.11522/pscjspe.2003s.0.580.0