Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Kitada Hideki and Nakamura Tomoji and Maeda Norihide and Fujimoto Yuji and Suzuki Kosuke and Kawai Akihito and Arai Kazuhisa and Ohba Takayuki,ウエハーレベル3次元積層におけるプラナリゼーション技術(キーノートスピーチ),Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2009,2009A,0,295-296,https://cir.nii.ac.jp/crid/1390282680628166528,https://doi.org/10.11522/pscjspe.2009a.0.295.0