Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Shiomitsu Takuma and Torii Toru,The techniques for micro-fabrication of Teflon film,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2009,2009S,0,257-258,https://cir.nii.ac.jp/crid/1390282680628494336,https://doi.org/10.11522/pscjspe.2009s.0.257.0