Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Kitamura Kei and Doi Toshiro and Kurokawa Syuhei and Matsukawa Yoji and Yamazaki Tsutomu and Yin Tao and Hasegawa Tadashi and Koshiyama Isamu and Ichikawa Koichiro,加工雰囲気を制御できる両面同時CMP装置の設計試作,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2010,2010A,0,137-138,https://cir.nii.ac.jp/crid/1390282680629005952,https://doi.org/10.11522/pscjspe.2010a.0.137.0