Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Tsunokawa Keiji and Suwabe Hitoshi and Ishikawa Ken-ichi,Relationship between Processing Characteristics and Grooved Plate of Single Wafer Lapping,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2008,2008A,0,433-434,https://cir.nii.ac.jp/crid/1390282680629148928,https://doi.org/10.11522/pscjspe.2008a.0.433.0