Development of Evaluation Method for Geometrical Characterization of Polishing Pad Surface Texture Based on Contact Image Analysis Using Image Rotation Prism

DOI

Bibliographic Information

Other Title
  • ダブプリズムを用いた接触画像解析法に基づくポリシングパッド表面性状の定量評価手法の開発に関する研究
  • Effect of Serial Batch Polishing Tests on Polishing Pad Surface Texture and Polishing Characteristics
  • 連続バッチ研磨がパッド表面性状並びに研磨特性に及ぼす影響

Description

In the polishing process, the removal rate is affected by changing the pad surface texture due to the deterioration, etc. Therefore, the measurement and quantitative evaluation methods for geometric characterization of polishing pad surface texture are being attempted actively in various research institutes. Here, we have proposed a measurement method for polishing pad surface texture based on contact image analysis using image rotation prism as the four evaluation parameters; (1) number of contact points, (2) contact ratio, (3) spacing of contact points and (4) spatial FFT result of a contact image. In this paper, we demonstrated the serial batch polishing tests and evaluated changing in the pad surface texture with increasing number of polishing test. As the results, it is clear that there are remarkably correlation between the evaluation parameters and the removal rate.

Journal

Keywords

Details 詳細情報について

  • CRID
    1390282680631676416
  • NII Article ID
    130005030611
  • DOI
    10.11522/pscjspe.2011s.0.343.0
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

Report a problem

Back to top