Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Yasuda Keisuke and Kimura Keiichi and Suzuki Keisuke and Khajornrungruang Panart and Isono Shintarou,MEMS技術を応用したCMP用マイクロパターンパッドの研究,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2011,2011S,0,349-350,https://cir.nii.ac.jp/crid/1390282680631677824,https://doi.org/10.11522/pscjspe.2011s.0.349.0