Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Yamazaki Tsutomu and Seshimo Kiyoshi and Tsukamoto Keiichi and Ohtsubo Masanori and Nishizawa Hideaki and Miyashita Tadakazu and Takagi Masataka and Doi Toshiro,Development of the polishing process technology of the crystal substrate for green devices (9th Report),Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2015,2015A,0,443-444,https://cir.nii.ac.jp/crid/1390282680633695104,https://doi.org/10.11522/pscjspe.2015a.0_443