Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Ozawa Nobuki and Aizawa Takehiro and Kawaguchi Kentaro and Higuchi Yuji and Kubo Momoji,計算科学シミュレーションによるシリカ砥粒を用いたα-Al<sub>2</sub>O<sub>3</sub>基板の化学機械研磨プロセスの検討,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2014,2014A,0,435-436,https://cir.nii.ac.jp/crid/1390282680634107264,https://doi.org/10.11522/pscjspe.2014a.0_435