Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Abe Kozo and Koga Masaki and Tsuzaki Hironori,Residual Subsurface Damaged Layer Evaluation of Single Crystal SiC Wafers by Accurate Angle Polishing Method,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2015,2015A,0,239-240,https://cir.nii.ac.jp/crid/1390282680634149888,https://doi.org/10.11522/pscjspe.2015a.0_239