Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Tamaru Yuuma and Matsumoto Tetsuya and Shimizu Hiroki,Development of fine motion table supported by squeezed air films based on levitation force control,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2017,2017A,0,727-728,https://cir.nii.ac.jp/crid/1390282680634205568,https://doi.org/10.11522/pscjspe.2017a.0_727