Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Suzuki Ryutaro and Otsuka Jiro and Toake Yasushi and Nishide Tetsuhiro and Nakata Atsushi and Oosawa Hirofumi and Nozaki Takashi,Prevention of Thermal Deformation of Precision Positioning Device by Peltier Effect,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2015,2015S,0,595-596,https://cir.nii.ac.jp/crid/1390282680635411328,https://doi.org/10.11522/pscjspe.2015s.0_595