Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Chiba Shogo and Iga Misato and Tsuchida Masuhiro and Kemuriyama Yasuharu and Takahashi Tatsuo and Kusumi Takayuki and Akagami Yoichi,電界砥粒制御技術と樹脂パッドを適用したサファイア基板の高効率研磨技術の開発,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2014,2014A,0,439-440,https://cir.nii.ac.jp/crid/1390282680636109952,https://doi.org/10.11522/pscjspe.2014a.0_439