Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Hayakawa Kosuke and Uneda Michio and Shibuya Kazutaka and Nakamura Yoshio and Ichikawa Daizo and Ishikawa Ken-ichi,Development of Measuring Device for Polishing Pad Pasted Upper Platen of Double-Sided Polisher and Its Application for Polishing Characteristics Evaluation,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2017,2017S,0,535-536,https://cir.nii.ac.jp/crid/1390282680636232832,https://doi.org/10.11522/pscjspe.2017s.0_535