Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Ishii Tomoyuki and Shimizu Seigi and Murakami Sunao and Tashiro Yasunori and Oniki Takahiro and Ito Takahiro,Fabrication of conical microstructures on the surface of single crystal silicon substrate by anisotropic etching,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2015,2015S,0,797-798,https://cir.nii.ac.jp/crid/1390282680636938368,https://doi.org/10.11522/pscjspe.2015s.0_797