Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Iwata Hiroshi and Kato Daiki and Furusawa Masashi and Ishii Hiroki and Sekiya Takao and Tanaka Masatoshi,Formation and properties of the Zirconium nitride thin film by the DC magnetron sputtering,Abstract of annual meeting of the Surface Science of Japan,,The Japan Society of Vacuum and Surface Science,2015,35,0,115,https://cir.nii.ac.jp/crid/1390282680654509440,https://doi.org/10.14886/sssj2008.35.0_115