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particles"},{"@language":"ja","@value":"スパッタリング中性粒子のレーザーイオン化システムの構築"}],"description":[{"type":"abstract","notation":[{"@language":"ja","@value":"固体にイオンビームを照射してスパッタリングにより放出される粒子の大部分は中性粒子である。我々のグループでは高速重イオンをターゲットに入射し、その表面から放出される二次イオンを飛行時間測定法を用いて質量分析することで電子的スパッタリングのメカニズムについての研究を行ってきた。そのためには二次粒子のうちの大部分を占める中性粒子のふるまいを解析することが不可欠であり、二次中性粒子をレーザーによりイオン化し質量分析するための新たなシステムを構築した。"}],"abstractLicenseFlag":"disallow"}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1410290696712815493","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000392064547"}],"foaf:name":[{"@language":"en","@value":"nagai masafumi"},{"@language":"ja","@value":"永井 雅史"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Department of Nuclear Engineering, Kyoto University"},{"@language":"ja","@value":"京大院工"}]},{"@id":"https://cir.nii.ac.jp/crid/1410290696712815491","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000392064548"}],"foaf:name":[{"@language":"en","@value":"ninomiya 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