Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) ISHII Junzo and YANASE Shinichiro,1511 The analysis of new model for semiconductor washing device best design,The Proceedings of Conference of Chugoku-Shikoku Branch,2424-2764,The Japan Society of Mechanical Engineers,2010,2010.48,0,481-482,https://cir.nii.ac.jp/crid/1390282680838547584,https://doi.org/10.1299/jsmecs.2010.48.481