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- INAO Takuya
- Kyushu University
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- Ohnishi Osamu
- Kyushu University
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- DOI Toshiro
- Kyushu University
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- KUROKAWA Syuhei
- Kyushu University
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- UNEDA Michio
- Kyushu University
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- SAJIMA Takao
- Kyushu University
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- MIZUE Hiroshi
- Oita Industrial Research Institute
Bibliographic Information
- Other Title
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- 915 シリコンのワイヤ放電加工特性(CMP加工3)
Journal
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- The Proceedings of Conference of Kyushu Branch
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The Proceedings of Conference of Kyushu Branch 2012.65 (0), 335-336, 2012
The Japan Society of Mechanical Engineers
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Details 詳細情報について
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- CRID
- 1390282680842324352
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- NII Article ID
- 110009952503
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- ISSN
- 24242780
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
- CiNii Articles