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The determination method of the chemical reaction using the values of electronegativity and ionization energy is presented. The chemical reaction between the atom that has the highest electronegativity and the atom that has the lowest ionization energy occurs with first priority. The calculated results using the method have good agreement with the experimental results of synthesizing materials such as carbon and silicon carbide. Consequently, the method is useful to synthesizing compound semiconductors using plasma CVD 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University"},{"@language":"ja","@value":"愛媛大"}]},{"@id":"https://cir.nii.ac.jp/crid/1420564276171506816","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"20284391"},{"@type":"NRID","@value":"1000020284391"},{"@type":"NRID","@value":"9000003790002"},{"@type":"NRID","@value":"9000401725938"},{"@type":"NRID","@value":"9000392393040"},{"@type":"NRID","@value":"9000025086999"},{"@type":"NRID","@value":"9000107343586"},{"@type":"NRID","@value":"9000398256413"},{"@type":"NRID","@value":"9000107363843"},{"@type":"NRID","@value":"9000003814172"},{"@type":"NRID","@value":"9000006401802"},{"@type":"NRID","@value":"9000369741206"},{"@type":"NRID","@value":"9000258172966"},{"@type":"NRID","@value":"9000402049988"},{"@type":"NRID","@value":"9000401809569"},{"@type":"NRID","@value":"9000392270911"},{"@type":"NRID","@value":"9000054225456"},{"@type":"NRID","@value":"9000401570807"},{"@type":"NRID","@value":"9000392393059"},{"@type":"NRID","@value":"9000003811040"},{"@type":"NRID","@value":"9000402010428"},{"@type":"NRID","@value":"9000397685278"},{"@type":"NRID","@value":"9000046639771"},{"@type":"NRID","@value":"9000401738377"},{"@type":"NRID","@value":"9000404826193"},{"@type":"NRID","@value":"9000273024649"},{"@type":"NRID","@value":"9000402037620"},{"@type":"NRID","@value":"9000412530951"},{"@type":"NRID","@value":"9000242784642"},{"@type":"NRID","@value":"9000347296152"},{"@type":"NRID","@value":"9000401564525"},{"@type":"NRID","@value":"9000392393063"},{"@type":"NRID","@value":"9000397684400"},{"@type":"NRID","@value":"9000258183107"},{"@type":"NRID","@value":"9000367423280"},{"@type":"NRID","@value":"9000025118652"},{"@type":"NRID","@value":"9000345306514"},{"@type":"NRID","@value":"9000347177412"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/read0046965"}],"foaf:name":[{"@language":"ja","@value":"向笠 忍"},{"@language":"en","@value":"Mukasa Shinobu"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Ehime University"},{"@language":"ja","@value":"愛媛大"}]}],"publication":{"publicationIdentifier":[{"@type":"EISSN","@value":"2424290X"}],"prism:publicationName":[{"@language":"ja","@value":"熱工学コンファレンス講演論文集"},{"@language":"en","@value":"The Proceedings of the Thermal Engineering Conference"},{"@language":"ja","@value":"熱工学コンファレンス"}],"dc:publisher":[{"@language":"en","@value":"The Japan Society of Mechanical Engineers"},{"@language":"ja","@value":"一般社団法人 日本機械学会"}],"prism:publicationDate":"2009","prism:volume":"2009","prism:number":"0","prism:startingPage":"95","prism:endingPage":"96"},"reviewed":"false","url":[{"@id":"https://www.jstage.jst.go.jp/article/jsmeted/2009/0/2009_95/_pdf"}],"availableAt":"2009","foaf:topic":[{"@id":"https://cir.nii.ac.jp/all?q=plasma%20CVD","dc:title":"plasma 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