書誌事項
- タイトル別名
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- Measurement of Small Pressure Difference.
- ビショウ サアツ ノ ソクテイ
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A pressure gauge of the diaphragm type of high sensitivity has been developed to measure small differential pressures. Low and high pressures are each led to chambers which are separated with a membrane; the differential pressure between the two chambers give a displacement to the membrane, and the displacement is detected by a small laser displacement sensor through a glass window in the chamber wall. Tested membranes are permanently deformed in advance to a wavy form in order to give high sensitivity or are otherwise used in the flat condition. Easy exchange of the kinds of membranes makes it possible to widen the range of differential pressures measured. Calibration is made by means of a simple method using water heads. This type of pressure gauge can measure the pressure of magnitude from 0.1 Pa to 10 Pa.
収録刊行物
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- 日本機械学会論文集B編
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日本機械学会論文集B編 57 (541), 3013-3017, 1991
一般社団法人 日本機械学会
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詳細情報 詳細情報について
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- CRID
- 1390282680871616384
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- NII論文ID
- 110002390013
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- NII書誌ID
- AN00187441
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- ISSN
- 18848346
- 03875016
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- HANDLE
- 10191/5737
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- NDL書誌ID
- 3738679
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- IRDB
- NDL
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- 使用不可